產(chǎn)品詳情
| Part No. 1 | Part No. 2 | Debion | ||
| 0010-00183 | (001000183) | MOTOR Z-AXIS STEPPER ROBOT | ||
| 0010-00510 | (001000510) | ASSEMBLY BEARING | ||
| 0010-00706 | (001000706) | Clamp Ring, 150mm | ||
| 0010-00854 | (001000854) | DPS RF Matcher (R1? DPS+? POLY? RF? MATCH) | ||
| 0010-01286 | (001001286) | MCA Heater | ||
| 0010-01507 | (001001507) | DPS Cathode | ||
| 0010-01562 | (001001562) | ASSY,LOWER DTCU,DPS E-DTCU | ||
| 0010-01711 | (001001711) | ASSY, HP, UPGRADE ROBOT, ENDURA | ||
| 0010-02160 | (001002160) | MxP Throttle Valve | ||
| 0010-02342 | (001002342) | Ceramic heater | ||
| 0010-02616 | (001002616) | Gas Distribution Ring with RF Gasket.(ne | ||
| 0010-02702 | (001002702) | ASSY, UPPER E-DTCU, DPS | ||
| 0010-02768 | (001002768) | ASSY, V-ELECTRODE, WITH IEP, HR DTCU, .4 | ||
| 0010-03095 | (001003095) | 150mm Cathode Assy | ||
| 0010-03244 | (001003244) | HP+ HEATER | ||
| 0010-03254 | (001003254) | MCA+ Heater | ||
| 0010-03661 | (001003661) | SUCEPTOR | ||
| 0010-03840 | (001003840) | Producer Ceramic Heater | ||
| 0010-03843 | (001003843) | Cxz heater | ||
| 0010-04542 | (001004542) | CPR HEATER | ||
| 0010-05030 | (001005030) | Ceramic Heater | ||
| 0010-05256 | (001005256) | Heater | ||
| 0010-05964 | (001005964) | ASSY, CATHODE, 200MM NOTCH CESC, IS, 520, 1ea | ||
| 0010-05994 | (001005994) | ASSY,ESC/RF,200MM,NOTCH,DZ,OUTER RIM,EMA | ||
| 0010-06957 | (001006957) | ASS`Y OXIDE BULB, 750W | ||
| 0010-07121 | (001007121) | Unknown | ||
| 0010-09026 | (001009026) | ASSY, 125MM ROBOT BLADE (P5000) | ||
| 0010-09035 | (001009035) | ASSY BWCVD THROTTLE VALVE 100,125 &150MM | ||
| 0010-09088 | (001009088) | ROBOT CALIBRATION MOUSE | ||
| 0010-09133 | (001009133) | Susceptor 150MM silane | ||
| 0010-09340 | (001009340) | susceptor lift ass`y | ||
| 0010-09341 | (001009341) | wafer lift ass`y | ||
| 0010-09348 | (001009348) | universal throttle valve | ||
| 0010-09400 | (001009400) | Susceptor | ||
| 0010-09416 | (001009416) | ASSY RF MATCH,ETCH(MATCH BOX MXP) | ||
| 0010-09499 | (001009499) | Hinge | ||
| 0010-09559 | (001009559) | Pedestal, Assy. | ||
| 0010-09575 | (001009575) | PEDESTAL ASSY OX/MLR/NIT 150MM | ||
| 0010-09651 | (001009651) | Butterfly Throttle v/v ass'y with foreline | ||
| 0010-09672 | (001009672) | PLASMA SENSOR ASSY,PRSP | ||
| 0010-09732 | (001009732) | Pedestal | ||
| 0010-09737 | (001009737) | ASSY SUS 150MM 6MM SHADOW RING BWCVD | ||
| 0010-09823 | (001009823) | Vessel Assy Single H20 | ||
| 0010-09917 | (001009917) | End Point assy. | ||
| 0010-09919 | (001009919) | Pedestal, 200mm | ||
| 0010-09936 | (001009936) | Connector | ||
| 0010-09968 | (001009968) | Slot Valve | ||
| 0010-09973 | (001009973) | Pedestal | ||
| 0010-09982 | (001009982) | dual spring throttle valve | ||
| 0010-10010 | (001010010) | Heat Gate Valve, assy. | ||
| 0010-10106 | (001010106) | VDS FACILITY COMPONENTS INTERFACE UNIT | ||
| 0010-10132 | (001010132) | Susceptor SQP21 | ||
| 0010-10204 | (001010204) | ESC Pedestal Clip | ||
| 0010-10327 | (001010327) | ESC, 200mm | ||
| 0010-10328 | (001010328) | SHELL ASSY,200MM FLAT,OXIDE ETCH ESC | ||
| 0010-10448 | (001010448) | ASSEMBLY,HINGE,R2 | ||
| 0010-10449 | (001010449) | ASSEMBLY,ACTUATOR/WATER BOX,R2 CHAMBER | ||
| 0010-10529 | (001010529) | Pedestal E-Chuck | ||
| 0010-10621 | (001010621) | ASSY TOP LID,SSGD,MXP CENTURA/METCH 5000 | ||
| 0010-10741 | (001010741) | HEATER | ||
| 0010-10758 | (001010758) | DSGD Lid, Assy. | ||
| 0010-10759 | (001010759) | Top Lid, SSGD MKII/MxP | ||
| 0010-10902 | (001010902) | Connector, HV Module, Assy. | ||
| 0010-10970 | (001010970) | ASSY, VDS, 750 SCCM, CENTURA | ||
| 0010-10982 | (001010982) | ESC OXIDE (P-5000) | ||
| 0010-11007 | (001011007) | Plate Position Detector | ||
| 0010-11084 | (001011084) | End controller | ||
| 0010-11128 | (001011128) | 1ND Defector Robot | ||
| 0010-11128 | (001011128) | Robot Position Detector | ||
| 0010-11138 | (001011138) | 1ND Defector Robot | ||
| 0010-11173 | (001011173) | Vacuum Tongue | ||
| 0010-11925 | (001011925) | Magnet | ||
| 0010-13272 | (001013272) | ASSY,HP UPGRADE ROBOT DRIVER UPPER/LOWER | ||
| 0010-15505 | (001015505) | Unknown | ||
| 0010-15506 | (001015506) | Unknown | ||
| 0010-18129 | (001018129) | Top Match Box | ||
| 0010-20095 | (001020095) | Assy,3.5 Micro Floppy 1.4M | ||
| 0010-20222 | (001020222) | Magnet | ||
| 0010-20252 | (001020252) | ASSY ORIENTER ROTATION | ||
| 0010-20258 | (001020258) | Magnet, a-type | ||
| 0010-20295 | (001020295) | ASSY LIFTER ORIENTER | ||
| 0010-20300 | (001020300) | ASSY LIFT PVD | ||
| 0010-20328 | (001020328) | Magnets Ass'y | ||
| 0010-20339 | (001020339) | ASSY ORIENTER ROTATION MOTOR | ||
| 0010-20524 | (001020524) | MODIFIED 8" RF MATCH (Preclean II) | ||
| 0010-20664 | (001020664) | SLIT VALVE ASSY | ||
| 0010-20756 | (001020756) | RF TUBE ASSEMBLY PRECLEAN 2 | ||
| 0010-21154 | (001021154) | pump interface | ||
| 0010-21403 | (001021403) | magnet, non-encapsulated | ||
| 0010-21530 | (001021530) | Ass'y NON-NTM ADVANCED 101 6" 5500 PVD | ||
| 0010-21670 | (001021670) | Magnets Ass'y | ||
| 0010-21810 | (001021810) | Magnets Ass'y | ||
| 0010-21940 | (001021940) | Magnets Ass'y | ||
| 0010-24197 | (001024197) | Unknown | ||
| 0010-24198 | (001024198) | Unknown | ||
| 0010-26439 | (001026439) | Magnets Ass'y | ||
| 0010-30059 | (001030059) | Pedestal | ||
| 0010-30094 | (001030094) | ASSY,RF MATCH,W/PEAK DETECTOR,SC/ESC | ||
| 0010-30112 | (001030112) | Heater | ||
| 0010-30134 | (001030134) | DPS Cathode | ||
| 0010-30135 | (001030135) | DPS, METAL, THROTTLE VALVE 5-PHASE, ASSY | ||
| 0010-30685 | (001030685) | ASSY, FLOW METER ASP+ | ||
| 0010-30686 | (001030686) | SUPER-E RF MATCH BOX | ||
| 0010-35282 | (001035282) | ASSY OXIDE BULB 750 W | ||
| 0010-35626 | (001035626) | ASSY,CARD CAGE SERIPLEX,SOURCE MATCH CNT 1 | ||
| 0010-35808 | (001035808) | EC lid assy enhanced cooling lid assy | ||
| 0010-36408 P4 | (001036408P4) | ASSY,RF MATCH,DPS CHAMBER | ||
| 0010-36900 P1 | (001036900P1) | ASSY, AE RF-MATCH (3155086-001), DTCU, DPS POLY | ||
| 0010-37266 | (001037266) | ASSY,P-CHUCK,200MM,THICK CABLE W/GRND TC | ||
| 0010-37741 | (001037741) | MOLDED COVER (TxZ HP+ Lid Cover), PUMPING PLATE, TXZ | ||
| 0010-38754 | (001038754) | DPS R1 HR DTCU | ||
| 0010-39016 | (001039016) | ASSY, POWER SUPPLY SERIPLEX,SOURCE MATCH 1 | ||
| 0010-39750 | (001039750) | DPS R1, DTCU W/UNIVERSAL COIL, ASSY | ||
| 0010-39750 | (001039750) | DTCU DPS Dome | ||
| 0010-39852 | (001039852) | ASSY,CATHODE CERAMIC ESC,SUPER-E/MXP+ OX, 1ea | ||
| 0010-60018 | (001060018) | 6" Susc ENH Con (Gigantgap) NIT | ||
| 0010-70131 | (001070131) | 8" P-5000 WAFER ORIENTER | ||
| 0010-70247 | (001070247) | LASER OPTIC ASSY, ORIENTER | ||
| 0010-70254 | (001070254) | ASSY 8" HEATER VCR W/2 TC'S | ||
| 0010-70264 | (001070264) | Upper and Lower | ||
| 0010-70271 | (001070271) | A101 TTN WAFER LIFT ASSY 8" LIFT ASSY | ||
| 0010-70384 | (001070384) | CENTURA SCREEN BAFFLE ASSY | ||
| 0010-75100 | (001075100) | Assy,Throttle Valve , R2 | ||
| 0010-75186 | (001075186) | ASS'Y, COOL DOWN CHAMBER, NON-END | ||
| 0010-76004 | (001076004) | ROBOT BLADE 6" | ||
| 0010-76036 | (001076036) | Minicontroller????? | ||
| 0010-76042 | (001076042) | ASSY, SLIT VALVE, PRSP/ASP, SILICON | ||
| 0010-76097 | (001076097) | MONITOR BASE ASSY | ||
| 0010-76124 | (001076124) | I/O board | ||
| 0010-76174? | (001076174) | ASSY,THROTTLE VALVE DUAL SPRING? | ||
| 0010-76994 | (001076994) | Door, Slit Valve | ||
| 0010-90605 | (001090605) | ASSY. MOV CLIP 0 DEGREES | ||
| 0010-93146 | (001093146) | 15v Power Supply | ||
| 0015-00054 | (001500054) | PAD HEAT 8330 CONDUCTIVE G | ||
| 0015-09056 | (001509056) | BELLOWS. HOOP SOLID | ||
| 0015-09122 | (001509122) | ASSY CAM FOLLOWER | ||
| 0015-09132 | (001509132) | SCREW. HALF DOG POINT BWCVD | ||
| 0015-09334 | (001509334) | SCREW 10-32 X 1.25 CAPTIVE | ||
| 0015-11086 | (001511086) | Shuttle Encoder | ||
| 0015-11117 | (001511117) | Isolation valve 2 | ||
| 0015-20124 | (001520124) | SCR 1/4-20 1 Titanum Vented Flat Head | ||
| 0015-70004 | (001570004) | D SCREW 29 SLOT | ||
| 0020-00406 | (002000406) | Bushing Pedestal RPC+ | ||
| 0020-01006 | (002001006) | Ultima HDP TE Ceramic Dome | ||
| 0020-01017 | (002001017) | Fittings Bellows 50mm 18mm dia | ||
| 0020-01024 | (002001024) | Window | ||
| 0020-01074 | (002001074) | CUP VAC PICKUP 8100 | ||
| 0020-03379 | (002003379) | Gas Distribution Plate | ||
| 0020-03394 | (002003394) | Bracket, Upper Coil | ||
| 0020-03398 | (002003398) | Insulation Pipe, quartz | ||
| 0020-03423 | (002003423) | Pedestal, 150 mm | ||
| 0020-03426 | (002003426) | Vespel Plug | ||
| 0020-03430 | (002003430) | Insert, Ped, EXT, 6 | ||
| 0020-03431 | (002003431) | Insert Pedestal, 125mm | ||
| 0020-03435 | (002003435) | Pedestal, 6, EXT | ||
| 0020-03438 | (002003438) | Clamp Ring, Qtz. 150mm | ||
| 0020-03466 | (002003466) | SPRING HUB GRIPPER 8336 | ||
| 0020-03553 | (002003553) | SCREW COVER. ETCH CHMBR | ||
| 0020-03597 | (002003597) | Carrier | ||
| 0020-03636 | (002003636) | Vespel screw | ||
| 0020-03636 | (002003636) | Screw | ||
| 0020-03652 | (002003652) | FILM PROTECTIVE | ||
| 0020-03656 | (002003656) | Screw, Vespel | ||
| 0020-03657 | (002003657) | Rim | ||
| 0020-03658 | (002003658) | Clamp ring | ||
| 0020-03660 | (002003660) | Screw, Vespel | ||
| 0020-03661 | (002003661) | Plug Threaded | ||
| 0020-03674 | (002003674) | Sleeve, Centering Clamping | ||
| 0020-03690 | (002003690) | Finger, Flange | ||
| 0020-03697 | (002003697) | Screw, Vespel | ||
| 0020-04036 | (002004036) | Base, Flange | ||
| 0020-04058 | (002004058) | Ring, Pedestal SI 200mm | ||
| 0020-04076 | (002004076) | Gas Distribution Plate | ||
| 0020-04124 | (002004124) | Cover | ||
| 0020-04127 | (002004127) | Clamp, Ring, 6 WF, TU | ||
| 0020-04129 | (002004129) | Bracket, Top Hinge | ||
| 0020-04131 | (002004131) | Handle, Insulator | ||
| 0020-04142 | (002004142) | Rim | ||
| 0020-04143 | (002004143) | Sleeve, Center Clamping Ring | ||
| 0020-04159 | (002004159) | Pedestal, 200mm | ||
| 0020-04160 | (002004160) | Spacer, Circular | ||
| 0020-04164 | (002004164) | Carrier, 200mm | ||
| 0020-04167 | (002004167) | Cylinder | ||
| 0020-04189 | (002004189) | Adapter, Top | ||
| 0020-04192 | (002004192) | Hinge Insulator | ||
| 0020-04194 | (002004194) | Lid, Top | ||
| 0020-04277 | (002004277) | Insulating, Flange | ||
| 0020-04278 | (002004278) | Cylinder, Clamping | ||
| 0020-06048 | (002006048) | BUSHING-THROTTLE V | ||
| 0020-06815 | (002006815) | HEX INSULATOR (8310) | ||
| 0020-06978 | (002006978) | PEDESTAL SPRING | ||
| 0020-09034 | (002009034) | BEARING HOUSING | ||
| 0020-09039 | (002009039) | Strip | ||
| 0020-09064 | (002009064) | Window, Flange | ||
| 0020-09067 | (002009067) | MATCH ROD | ||
| 0020-09069 | (002009069) | Lift Pin, | ||
| 0020-09088 | (002009088) | Shaft Spacer | ||
| 0020-09316 | (002009316) | Blocker Plate | ||
| 0020-09365 | (002009365) | Bracket, Lower | ||
| 0020-09373 | (002009373) | Seal, Small Face | ||
| 0020-09376 | (002009376) | O-Ring 2-279 329.79x3.53 Viton BOTTOM COVER | ||
| 0020-09545 | (002009545) | UV filter b | ||
| 0020-09547 | (002009547) | Flange, Vespel | ||
| 0020-09601 | (002009601) | Window | ||
| 0020-09618 | (002009618) | BUSHING, PLUG | ||
| 0020-09622 | (002009622) | PLUG, THROTTLE VALVE | ||
| 0020-09651 | (002009651) | Bracket | ||
| 0020-09772 | (002009772) | Filter, Slit b Quartz | ||
| 0020-09843 | (002009843) | Sleeve Wafer Pin | ||
| 0020-09879 | (002009879) | Cover Top | ||
| 0020-09913 | (002009913) | Pedestal | ||
| 0020-09933 | (002009933) | Gas Distribution | ||
| 0020-09963 | (002009963) | Screw, Vespel | ||
| 0020-10117? | (002010117) | PLATE PERF OXIDE 200MM? | ||
| 0020-10119 | (002010119) | Plate Perf. 150MM | ||
| 0020-10403 | (002010403) | PUMPING PLATE 4-6" SiO2 | ||
| 0020-10404 | (002010404) | BUSHING PUMPING PLATE ID .187 | ||
| 0020-10405 | (002010405) | BUSHING PUMPING PLATE ID .094 | ||
| 0020-10527 | (002010527) | Gas Distribution, Sputter | ||
| 0020-10598 | (002010598) | Shower Head | ||
| 0020-10721 | (002010721) | COVER, SCREW, TEFLON | ||
| 0020-10731 | (002010731) | Plate, Pumping 150mm | ||
| 0020-10752 | (002010752) | Pumping Plate Nitride Giant Gap | ||
| 0020-10815 | (002010815) | SHIELD 150MM EC | ||
| 0020-10888 | (002010888) | Set Screw Slotted | ||
| 0020-10890 | (002010890) | SCREW. PANHEAD 6-32 X 1/2" AL | ||
| 0020-10941 | (002010941) | ISOLATOR TEFLON AMT 5000 | ||
| 0020-11434 | (002011434) | Up and Down Lift Flange | ||
| 0020-11755 | (002011755) | Pin Insert | ||
| 0020-11773 | (002011773) | Slit Door, Vespel Liner (Metal) | ||
| 0020-11930 | (002011930) | Block drive | ||
| 0020-12020 | (002012020) | Rotor Spring End Plate | ||
| 0020-12099 | (002012099) | Clip Nest | ||
| 0020-12103 | (002012103) | Spring nest | ||
| 0020-13217 | (002013217) | PLATE, REINFORCING, EARTHQUAKE BRKT MTG | ||
| 0020-14371 | (002014371) | Calibration tool | ||
| 0020-14373 | (002014373) | Calibration Holder. Blocker | ||
| 0020-18369? | (002018369) | CONNECTOR,RF POST,BAIS,HDP-CVD? | ||
| 0020-18377? | (002018377) | Helium Flange? | ||
| 0020-18899 | (002018899) | Nozzle Teflon Washer | ||
| 0020-19003 | (002019003) | INSERT, SLIT VALVE SHO | ||
| 0020-20232 | (002020232) | FLANGE, EXHAUST FAN | ||
| 0020-20522 | (002020522) | Ceramic Washer, Insulator, Alumina (PTIP-00089) | ||
| 0020-20587 | (002020587) | INSERT, SLIT VALVE MACHINED | ||
| 0020-20595 | (002020595) | STRIP, HOLD DOWN, 10 CHANNEL GASBOX | ||
| 0020-20596 | (002020596) | GASKET, 10 CHANNEL GASBOX | ||
| 0020-21463 | (002021463) | SHIELD PVD E5500 | ||
| 0020-21654 | (002021654) | 12' ceramic? | ||
| 0020-21664 | (002021664) | INSULATOR SOURCE 13 | ||
| 0020-21681 | (002021681) | Support Bracket Orienter | ||
| 0020-21682 | (002021682) | Chuck Orienter | ||
| 0020-21699 | (002021699) | BRACKET MOUNT LASER SEE | ||
| 0020-21731 | (002021731) | SUPPORT DOOR PRE-CLEAN 550 | ||
| 0020-21732 | (002021732) | BRACKET FINGER PRE-CLEAN 5 | ||
| 0020-21750 | (002021750) | GUARD FINGER ETCH E5500 | ||
| 0020-21754 | (002021754) | PLATE POCKET ETCH E5500 | ||
| 0020-22182 | (002022182) | CATHODE FLAME SPRAY ETCH E | ||
| 0020-22241 | (002022241) | LIFT FINGER REV D | ||
| 0020-22652 | (002022652) | COLIMATOR 1.5 ASPECT RATIO | ||
| 0020-22844 | (002022844) | Pedestal Shield 8" Preclean | ||
| 0020-22910? | (002022910) | BASIC BELLOWS ORIENTER(ENDURA)? | ||
| 0020-22920 | (002022920) | SHIELD ALUMN PRE CLEAN2 5 | ||
| 0020-22982 | (002022982) | ADAPTER TIN 8" WAFER CHAMBER 16" (Source Adaptor) | ||
| 0020-24018 | (002024018) | Pin Antenna PC II Poli SI | ||
| 0020-24326 | (002024326) | Clip Spring PC II Antenna Dowell | ||
| 0020-24456 | (002024456) | QUARTZ CATHODE HOLDER PRECLEAN | ||
| 0020-26588 | (002026588) | Shield 8" PCII @C&D | ||
| 0020-26967 | (002026967) | PCII Gas Trench Cover | ||
| 0020-26971 | (002026971) | KIT DC BIAS HARDWARE | ||
| 0020-26971 | (002026971) | DISK SHUTTER | ||
| 0020-27123 | (002027123) | Pedestal PCII 8" SNNF | ||
| 0020-27124 | (002027124) | Ion T/C Controller | ||
| 0020-27124 | (002027124) | CATHODE PRE CLEAN 2 5500 | ||
| 0020-27668? | (002027668) | BLADE 8" 101 SHUTTER? | ||
| 0020-27740 | (002027740) | CLAMP RING 4 POINT ENDURA | ||
| 0020-29344? | (002029344) | SINGLE SHIELD, 8" B101 .190 VECTRA IMP? | ||
| 0020-30031 | (002030031) | NUT. FINGER WCVD | ||
| 0020-30032 | (002030032) | NUT. JAM FINGER WCVD | ||
| 0020-30033 | (002030033) | Pin AOV Clamp | ||
| 0020-30073 | (002030073) | Clamp Cylinder, 200mm | ||
| 0020-30092 | (002030092) | Ring, External | ||
| 0020-3010 | (00203010) | Manifold Output | ||
| 0020-30102 | (002030102) | MANIFOLD, OUTPUT, SACVD | ||
| 0020-30108 | (002030108) | Shield Clamp, Aluminm | ||
| 0020-30174 | (002030174) | Clamp | ||
| 0020-30178 | (002030178) | Sputter Etch Carrier | ||
| 0020-30185 | (002030185) | Alum. Screws | ||
| 0020-30196 | (002030196) | Strip, Contact | ||
| 0020-30198 | (002030198) | Tube, External | ||
| 0020-30205 | (002030205) | Pedestal | ||
| 0020-30222 | (002030222) | Adapter, Handle Top Cover | ||
| 0020-30223 | (002030223) | Plate, Gas Distribution | ||
| 0020-30228 | (002030228) | Screen Plasma | ||
| 0020-30342 | (002030342) | Pedestal | ||
| 0020-30345 | (002030345) | Plug | ||
| 0020-30347 | (002030347) | Cylinder, External | ||
| 0020-30354 | (002030354) | Finger | ||
| 0020-30357 | (002030357) | Plug, Gas Distribution Plate | ||
| 0020-30362 | (002030362) | Top Ring, 200mm | ||
| 0020-30406 | (002030406) | PERF PLATE 150MM BW REV D | ||
| 0020-30418 | (002030418) | Ring, Top | ||
| 0020-30481 | (002030481) | Carrier | ||
| 0020-30482 | (002030482) | Coupling, Flex | ||
| 0020-30483 | (002030483) | Clamp Ring, 200mm | ||
| 0020-30553 | (002030553) | INSULATOR #10 SCREW Teflon | ||
| 0020-30566 | (002030566) | Clamp Ring | ||
| 0020-30608 | (002030608) | Pedestal, 150mm | ||
| 0020-30651 | (002030651) | Insert | ||
| 0020-30656 | (002030656) | Screw | ||
| 0020-30670 | (002030670) | Pickup | ||
| 0020-30681 | (002030681) | Manifold Input | ||
| 0020-30701 | (002030701) | Insert | ||
| 0020-30723 | (002030723) | Cylinder | ||
| 0020-30922 | (002030922) | Insert | ||
| 0020-30949 | (002030949) | Pedestal Cover | ||
| 0020-31017 | (002031017) | BUSHNG TERMINAL BWCVD | ||
| 0020-31064? | (002031064) | HOLDER,PIN,HDP-CVD? | ||
| 0020-31147 | (002031147) | Insert Base, 150-200mm | ||
| 0020-31247 | (002031247) | RING WAFER LIFT 100-150MM UNIV CHAMBER | ||
| 0020-31252 | (002031252) | Finger | ||
| 0020-31275 | (002031275) | Plug | ||
| 0020-31304 | (002031304) | Insert, Outer | ||
| 0020-31343 | (002031343) | Gas Distribution Plate | ||
| 0020-31488 | (002031488) | Gas Distribution Plate | ||
| 0020-31490 | (002031490) | GDP 37 holes (poly) | ||
| 0020-31492 | (002031492) | Gas Distribution Plate | ||
| 0020-31493 | (002031493) | UNI-LID G.D.P | ||
| 0020-31499 | (002031499) | Cover | ||
| 0020-31510 | (002031510) | Pedestal | ||
| 0020-31536 | (002031536) | Gas Distribution Plate | ||
| 0020-31564 | (002031564) | Rod, Cathode | ||
| 0020-31570 | (002031570) | Lift Pin | ||
| 0020-31596 | (002031596) | Guide, Hinge | ||
| 0020-31597 | (002031597) | Insulator Handle | ||
| 0020-31600 | (002031600) | Shield, Protective, Unibody Lid Cover | ||
| 0020-31614 | (002031614) | Pedestal | ||
| 0020-31619 | (002031619) | Strap Connection | ||
| 0020-31626 | (002031626) | Flange | ||
| 0020-31628 | (002031628) | Ardel Insulator | ||
| 0020-31632 | (002031632) | Carrier, ESC | ||
| 0020-31633 | (002031633) | Lift Pin | ||
| 0020-31638 | (002031638) | Cover | ||
| 0020-31658 | (002031658) | Clamp Ring, 200mm | ||
| 0020-31659 | (002031659) | Cover | ||
| 0020-31660 | (002031660) | Bracket, Symmetrical | ||
| 0020-31661 | (002031661) | Bracket, Symmetrical | ||
| 0020-31662 | (002031662) | Bracket, Clamp | ||
| 0020-31663 | (002031663) | Bracket, Lower Coil | ||
| 0020-31666 | (002031666) | INSERT, 4/48 WAFER LIFT BWCVD | ||
| 0020-31667 | (002031667) | SCREW, ADJUSTMENT FINGER BWCVD | ||
| 0020-31691 | (002031691) | CENTERING RING GATE VALVE | ||
| 0020-31698 | (002031698) | RING ADAPTER | ||
| 0020-31708 | (002031708) | Clamp | ||
| 0020-31709 | (002031709) | Pedestal | ||
| 0020-31740 | (002031740) | Screw, Vespel | ||
| 0020-31797 | (002031797) | Gas Plate, 61 Holes | ||
| 0020-31831 | (002031831) | GDP Top Cover | ||
| 0020-31833 | (002031833) | Hinge, Bracket | ||
| 0020-31855 | (002031855) | Heat Shield | ||
| 0020-31864 | (002031864) | Clamping Cylinder | ||
| 0020-31940 | (002031940) | Pedestal, AL 200 mm | ||
| 0020-32005 | (002032005) | DISC | ||
| 0020-32009 | (002032009) | Strip, Cathode | ||
| 0020-32036 | (002032036) | PLATE BLOCKER .100SX UNIVERSAL CHAMBER | ||
| 0020-32116 | (002032116) | MxP Throttle Valve Housing | ||
| 0020-32141 | (002032141) | Feedthru | ||
| 0020-32142 | (002032142) | Plug | ||
| 0020-32163 | (002032163) | Cover, Bottom Pedestal ESC | ||
| 0020-32164 | (002032164) | Finger Lift Pins | ||
| 0020-32165 | (002032165) | ESC, Cover | ||
| 0020-32166 | (002032166) | Cover, ESC | ||
| 0020-32167 | (002032167) | Carrier, Wafer Lift | ||
| 0020-32262 | (002032262) | Gas Distribution Plate | ||
| 0020-32320 | (002032320) | Gas Distribution Plate | ||
| 0020-32988 | (002032988) | Clamp, Vespel | ||
| 0020-33096 | (002033096) | Cover, Gas Feed | ||
| 0020-33166 | (002033166) | Thermal Transfer | ||
| 0020-33373 | (002033373) | INSULATING FLANGE ROUND FOR CL | ||
| 0020-33523 | (002033523) | PLATE,SIDE,RFMATCH,WATERBOX,R2 | ||
| 0020-33785 | (002033785) | Gas Distribution Plate | ||
| 0020-34014 | (002034014) | Clamp | ||
| 0020-34030 | (002034030) | Pedestal, ESC | ||
| 0020-34031 | (002034031) | Pedestal, ESC | ||
| 0020-34035 | (002034035) | Support Lift Cylinder | ||
| 0020-34036 | (002034036) | Rod, RF | ||
| 0020-34038 | (002034038) | Contact Retainer | ||
| 0020-34040 | (002034040) | Lift Pin | ||
| 0020-34113 | (002034113) | Insulator, Pedestal VLtem | ||
| 0020-34140 | (002034140) | Gas Distribution Plate | ||
| 0020-34142 | (002034142) | Chamber Lid | ||
| 0020-341719 | (0020341719) | Teflon Liner Screw | ||
| 0020-34312 | (002034312) | INLET, GAS FEED, SGD | ||
| 0020-34326 | (002034326) | GAS INLET, COVER SSGD | ||
| 0020-34341 | (002034341) | STANDOFF, R2, SSGD | ||
| 0020-34350 | (002034350) | Lift Pin | ||
| 0020-34445 | (002034445) | Blocker Plate DxZ Chamber | ||
| 0020-34484 | (002034484) | Shield | ||
| 0020-34684 | (002034684) | Support, Bellows | ||
| 0020-34695 | (002034695) | Cathode Liner | ||
| 0020-34720 | (002034720) | Teflon Nose Liner Screw | ||
| 0020-34760 | (002034760) | Lid Cover | ||
| 0020-34775 | (002034775) | BLOCKER PLATE SILANE | ||
| 0020-34831 | (002034831) | Plate Mounting | ||
| 0020-34911 | (002034911) | Plug | ||
| 0020-38884 | (002038884) | Adapter, Throttle Valve | ||
| 0020-39365 | (002039365) | BKT,MANUAL VALVE 0.8" SLD BOX CENTURA 52 | ||
| 0020-39500 | (002039500) | PUMP PLATE HANDLE | ||
| 0020-39695 | (002039695) | Lift Pin | ||
| 0020-39784 | (002039784) | Block Plate | ||
| 0020-42007 | (002042007) | LOCATOR,PIN CONN, WXZ | ||
| 0020-42009 | (002042009) | HOUSING,OUTER,CONN,FEMALE | ||
| 0020-42052 | (002042052) | HINGE, UPPER, WXZ | ||
| 0020-42272 | (002042272) | ??plate, blocker?wxz???? 4ea | ||
| 0020-42274 | (002042274) | ??plate, perf?wxz? 4ea | ||
| 0020-42284 | (002042284) | BLOCKER PLATE | ||
| 0020-42285? | (002042285) | PLATE,BLOCKER 8" EC WXZ? | ||
| 0020-42286 | (002042286) | GAS PLATE | ||
| 0020-42287? | (002042287) | PLATE,PERF 8" EC WXZ? | ||
| 0020-48700? | (002048700) | EDGE RING, 9 HOLE COVER, HP TXZ? | ||
| 0020-70271? | (002070271) | PIVOT, ONE PIECE LEFT? | ||
| 0020-70272? | (002070272) | PIVOT, ONE PIECE RIGHT? | ||
| 0020-70336 | (002070336) | WING FROG LEG | ||
| 0020-76569 | (002076569) | CLAMP,BASE FRNT WATOR LINE FAC 1/F CENTURA 5200ST | ||
| 0020-76571 | (002076571) | CLAMP,BASE REAR WATER LINE FAC 1/F CENTURA 5200ST | ||
| 0020-76572 | (002076572) | CLAMP,PLT REAR WATER LINE FAC 1/F CENTURA 5200ST | ||
| 0020-76618 | (002076618) | CLAMP,HOLD REAR LITER FAC 1/F CENTURA 5200ST | ||
| 0020-90743 | (002090743) | Special Nut M3 | ||
| 0020-94074 | (002094074) | Flange | ||
| 0020-94074 | (002094074) | INSERT KIT (HEATSINK COATED, 150mm, 7deg.) | ||
| 0020-94509 | (002094509) | CONNECTOR BARREL | ||
| 0020-94830 | (002094830) | Clamp Plate Filament | ||
| 0020-94871 | (002094871) | INSULATOR | ||
| 0020-95391 | (002095391) | INSERT LARGE | ||
| 0020-96078 | (002096078) | TUBE GASELINE | ||
| 0020-96606 | (002096606) | SPRING FINGER | ||
| 0020-98922 | (002098922) | FLANGE | ||
| 0020-98961 | (002098961) | SCREW MOLV M4X6 | ||
| 0020-99239 | (002099239) | INSULATOR. EF. STEPPED | ||
| 0021-00488 | (002100488) | Cover | ||
| 0021-00540 | (002100540) | Blank off plate (throttle valve) | ||
| 0021-01421 | (002101421) | Upper chamber | ||
| 0021-01572? | (002101572) | FACEPLATE, GIGA-FILL SACVD, BPSG CENT 23? | ||
| 0021-01813 | (002101813) | Face Plate | ||
| 0021-02468 | (002102468) | LINER EXHANST TXZ 200MM | ||
| 0021-03481 | (002103481) | Controller rear mount bracket | ||
| 0021-03637 | (002103637) | FACE PLATE SILANE | ||
| 0021-03666 | (002103666) | FLAG, SENSOR, LIFT, TXZ MOD | ||
| 0021-03667 | (002103667) | SPACER, HARD STOP, HEATER LIFT, TXZ MOD | ||
| 0021-03739 | (002103739) | PUMPING CHANNEL LINER 3 PIECE | ||
| 0021-03739 | (002103739) | PUMPING CHANNEL LINER 3 PIECE | ||
| 0021-06499 | (002106499) | TEFLON FEEDTHROUGH | ||
| 0021-08190 | (002108190) | BRACKET, SUPPORT ZDCR | ||
| 0021-09006 | (002109006) | No debion | ||
| 0021-09016 | (002109016) | Wafer Transfer Lid, MXP+ | ||
| 0021-09098 | (002109098) | Ring, Separation | ||
| 0021-09105 | (002109105) | Lift Pin | ||
| 0021-09198 | (002109198) | Plate tube, lift | ||
| 0021-09426 | (002109426) | Bracket, Endpoint | ||
| 0021-09771 | (002109771) | Screw, Vespel | ||
| 0021-09780 | (002109780) | Thermal Foil | ||
| 0021-09806 | (002109806) | Window | ||
| 0021-09836 | (002109836) | Gasket | ||
| 0021-09902 | (002109902) | Al Thermal Transfer Sheet | ||
| 0021-10642 | (002110642) | Housing | ||
| 0021-15286 | (002115286) | PLATE, CLAMP LID, GDP, EMAX 200MM | ||
| 0021-20437? | (002120437) | DISK 8" B101 Ti SHUTTER IMP? | ||
| 0021-21875 | (002121875) | RING, DEPOSITION, 8" JMF, 9MM, ALUM, HTE | ||
| 0021-22123 | (002122123) | BLANK-OFF, BACKSIDE PURGE T/N TURBO ADAPTER | ||
| 0021-22159 | (002122159) | BLOCK MOUNTING MFC(MKS,STEC) | ||
| 0021-22163 | (002122163) | CLAMP SUPPORT ZDCR | ||
| 0021-22268 | (002122268) | VLOCK MOUNTING SHUT-OFF VALVE MODIFICD | ||
| 0021-35095 | (002135095) | Clamp Carrier | ||
| 0021-37053 | (002137053) | Bracket, Endpoint Window | ||
| 0021-38137 | (002138137) | Protection Cover | ||
| 0021-39385 | (002139385) | LID PLATE, SSGD, R2 CHAMBER | ||
| 0021-76742 | (002176742) | OUTR/GGGR SUPPORT BAR,SHIF INTERFACE,CENTURA MF | ||
| 0030-00195 | (003000195) | Large Face Seal | ||
| 0030-00220 | (003000220) | PEDESTAL CLIP | ||
| 0030-76014 | (003076014) | Bezel, monitor | ||
| 0040-00248 | (004000248) | Port Screen, Turbo Pump | ||
| 0040-00456 | (004000456) | Fiber Optic Cable | ||
| 0040-00457 | (004000457) | Fiber Optic Cable | ||
| 0040-00684 | (004000684) | PLATE,ADPTR,GATE VALVE TXZ CHMBR,MCVD/IMS COMP | ||
| 0040-01029 | (004001029) | NUT HOIST SUPER AME8116 | ||
| 0040-01618 | (004001618) | MANIFOLD, INPUT, 200MM PRODUCER | ||
| 0040-02520 | (004002520) | GAS BOX SILANE | ||
| 0040-02544 | (004002544) | DPS CHAMBER, UPPER, FULL A-COAT, SEALED ON | ||
| 0040-02793 | (004002793) | V-ELECTRODE, IEP, DETACHABLE W/COVERLAY | ||
| 0040-02818 | (004002818) | Block Mixing | ||
| 0040-02936 | (004002936) | TXZ WATER BOX | ||
| 0040-05142 | (004005142) | ELEMENT, HEATER CONN HPTXZ | ||
| 0040-05887 | (004005887) | Cathode Base | ||
| 0040-06741 | (004006741) | Controller front mount bracket | ||
| 0040-09002 | (004009002) | Chamber Body, Etch | ||
| 0040-09069 | (004009069) | CABLE ASSEMBLY AMT 5000 | ||
| 0040-09091 | (004009091) | CVD GAS BOX | ||
| 0040-09212 | (004009212) | Hoop | ||
| 0040-09217 | (004009217) | PIPE,CLUSTER EXHAUST, THROTTLE VALVE, NI | ||
| 0040-09255 | (004009255) | Pedestal, 200mm | ||
| 0040-09271 | (004009271) | BRACKET,BASE,WAFER LIFT | ||
| 0040-09723 | (004009723) | Unibody etch chamber with 397 step | ||
| 0040-09893 | (004009893) | CHAMBER BODY,R2,EDGES GAS FEED | ||
| 0040-09942 | (004009942) | SHELL ASS`Y 6 inc | ||
| 0040-09958 | (004009958) | ESC | ||
| 0040-13264 | (004013264) | ELBOW,LLC EXHAUST TTF, CENTURA COMMON | ||
| 0040-20136 | (004020136) | MANIFOLD, H20 SOURCE 13 | ||
| 0040-20561 | (004020561) | QUARTZ BELL JAR PRE CLEAN | ||
| 0040-22164 | (004022164) | HOUSING,LAMP/HEATER PWR, HTESC, W/ INNER | ||
| 0040-31846 | (004031846) | Cover | ||
| 0040-32042 | (004032042) | Base Weldment | ||
| 0040-32205 | (004032205) | Base Cathode DPS(METAL) | ||
| 0040-32449 | (004032449) | Lid | ||
| 0040-34865 | (004034865) | LINER, DGDP, CHAMBER, WAFFLE-LESS, 200MM | ||
| 0040-34866 | (004034866) | LINER, CATHODE, MAG RING, WAFFEL-LESS, D | ||
| 0040-36180 | (004036180) | Heater Assy(TXZ 200mm SNNF) | ||
| 0040-37667 | (004037667) | HP TXZ LID PLATE | ||
| 0040-45500 | (004045500) | COVER,10 CHANNEL GASBOX,HP TXZ | ||
| 0040-47028 | (004047028) | MANIFOLD OUTPUT, RIGHT (NEW ) | ||
| 0040-47029 | (004047029) | MANIFOLD OUTPUT, LEFT( NEW ) | ||
| 0040-47723 | (004047723) | MANIFOLD, OUTPUT, 1 HOLE, RIGHT | ||
| 0040-47724 | (004047724) | MANIFOLD, OUTPUT, 1 HOLE, LEFT | ||
| 0040-50414 | (004050414) | DOOR, SLIT VALVE, WAFFLE-LESS, 200MM EMAX | ||
| 0040-52662?? | (004052662) | DPS Upper Chamber | ||
| 0040-61877 | (004061877) | CxZ Chamber Lid Rev3 | ||
| 0040-99957 | (004099957) | DPS poly ESC | ||
| 0040-99960 | (004099960) | Assy ESC | ||
| 0050-10186 | (005010186) | ADAPTOR VALVE-TO-ADAPTOR VCR UNIBODY/EGE | ||
| 0050-21148? | (005021148) | GASLINE AMPULE MANIFOLD VERIFLO? | ||
| 0050-22607 | (005022607) | GAS LNE NO.3 PC CHMBK(REACTIVE) | ||
| 0050-24751 | (005024751) | ADAPTER W/B SHUTTER CNAMBER | ||
| 0050-25123? | (005025123) | Gasline, Reduced FTG Ampule In CVD RGB? | ||
| 0050-25197? | (005025197) | GAS LINE REDUCED FTG AMPOULE OUT CVD? | ||
| 0050-30759 | (005030759) | Cover, Gas Inlet | ||
| 0050-39363 | (005039363) | Vacuum Roughing Line Seiko Pump | ||
| 0050-43286 | (005043286) | WELAMENT,ELBOW EXHAUST FORE LINE A-B-C-D,WXZ 200MM | ||
| 0051-06016 | (005106016) | O-Ring 405.26x6.99 White Viton 60 | ||
| 0060-00650 | (006000650) | Warning label, TGV 75 lb | ||
| 0060-0415 | (00600415) | SCR Firing Control | ||
| 0060-21442 | (006021442) | Warning label, Hot Surface Hazard | ||
| 0060-2192 | (00602192) | Input Board 32-Channel | ||
| 0067-3405 | (00673405) | Shield, Heat Passivation R | ||
| 0067-8643 | (00678643) | PCB Assembly | ||
| 0067-8643 | (00678643) | PCB Assembly | ||
| 0080-20024 | (008020024) | SCHEMATIC BOTTOM & EDGE PURGE BSP CONTROL TXZ | ||
| 0090-00033 | (009000033) | End Point Detector | ||
| 0090-00045 | (009000045) | Control Unit, AC Window | ||
| 0090-00046 | (009000046) | HEATER. PAD ASSY. LID ETCH | ||
| 0090-00475 | (009000475) | GAS PANEL SERIPLEX BUS BOARD | ||
| 0090-01548 | (009001548) | Unknown | ||
| 0090-02346 | (009002346) | RF FILTER BOARD | ||
| 0090-03439 | (009003439) | Drive,CTRL,ASP Lifter | ||
| 0090-09002 | (009009002) | Rotation Motor with Encoder | ||
| 0090-09102 | (009009102) | Window, Assy. C322 | ||
| 0090-09108 | (009009108) | Thermo Switch | ||
| 0090-09112 | (009009112) | COIL MAGNET, SIDE | ||
| 0090-09116 | (009009116) | ASSY THERMAL ELEC DRIVER II VER 4 | ||
| 0090-09123 | (009009123) | AC Window | ||
| 0090-09124 | (009009124) | Window, Assy. | ||
| 0090-09125 | (009009125) | Window, Assy. | ||
| 0090-09143 | (009009143) | Window, Assy. | ||
| 0090-09165 | (009009165) | CATHODE RF PEAK VOLTAGE SENSOR ASSY | ||
| 0090-09166 | (009009166) | ASSY,HV ESC,200MM CATHODE,DPS | ||
| 0090-09259 | (009009259) | ESC Assy 195MM Notch Sample Cathode,MXP+ | ||
| 0090-20042 | (009020042) | ASS'Y,3 WAY VALVE | ||
| 0090-20043 | (009020043) | ASS'Y,4 WAY-SINGLE VALVE | ||
| 0090-35052 | (009035052) | EPI UPPER/LOWER PYROMETER(0090-35052) | ||
| 0090-35062 | (009035062) | HEATER 50W X 8/R2,LID | ||
| 0090-35123 | (009035123) | Motor Break Ass'y or Encoder Ass'y Elevator | ||
| 0090-35133 | (009035133) | SHELL, ASSY,195MM SEMI NOTCH NO FLAT, DP | ||
| 0090-35137 | (009035137) | Susceptor | ||
| 0090-35788 | (009035788) | FIXED MATCH | ||
| 0090-36126 | (009036126) | 1/2 ATM S/W | ||
| 0090-36414 | (009036414) | ASSY, TC AMP & OVERTEMP INTERLOCK, 300XZ | ||
| 0090-70008 | (009070008) | CASSETTE MOTOR | ||
| 0090-76110 | (009076110) | ASSEMBLY, ELECTRICAL, VME CPU SYNERGY UP | ||
| 0090-76133 | (009076133) | (SBC Energy Electrical Assy)?Assy Elect, SBC Synergy, 68040 CPU w/16MB RAM | ||
| 0100 11064 | (010011064) | PWB assembly.right | ||
| 0100-00368? | (010000368) | Cathode Base Temp PCB? | ||
| 0100-00369 | (010000369) | ASSY, PCB, DPS SOURCE MATCH/SERIPLEX, I/ 1 | ||
| 0100-00369 | (010000369) | ASSY, PCB, DPS SOURCE MATCH/SERIPLEX, I/ | ||
| 0100-00696 | (010000696) | Lamp/Heater/ESC Contactor Control Board | ||
| 0100-0183 | (01000183) | Motor Z-Axis Stepper Robot | ||
| 0100-01984 | (010001984) | Board Orienter control | ||
| 0100-01996 | (010001996) | PCB ASSY,SYSTEM ELECT | ||
| 0100-02016? | (010002016) | PCB ASSY, ANALOG SYNC DETECT? | ||
| 0100-09034 | (010009034) | PCB ASSY, LIQUID SOURCE INTERFACE | ||
| 0100-09204 | (010009204) | CONTROLLER BOARD H2O VDS? | ||
| 0100-09287 | (010009287) | GAS PANEL SERIPLEX MATRIX(A,B,C) | ||
| 0100-09293 | (010009293) | CHAMBER SERIPLEX MATRIX (CH.C) | ||
| 0100-11002W | (010011002W) | Digital Input/Output PCB Assy (PWBA slotted OPTO) | ||
| 0100-11006 | (010011006) | IPS Interface PWB | ||
| 0100-11015 | (010011015) | Power Drive PWB | ||
| 0100-11016 | (010011016) | Torque Converter PWB | ||
| 0100-11020 | (010011020) | RAM PWB | ||
| 0100-11024 | (010011024) | RS 232 isolator board | ||
| 0100-11027 | (010011027) | RS232 Breakout Board | ||
| 0100-11028 | (010011028) | H2 leak detector PWB | ||
| 0100-11030 | (010011030) | Prom A board | ||
| 0100-11031 | (010011031) | Prom B Board | ||
| 0100-11063 | (010011063) | PWB OPTO sensor | ||
| 0100-11065 | (010011065) | Video Board | ||
| 0100-11082 | (010011082) | Autoloader interface PCB | ||
| 0100-13025 | (010013025) | Video Board | ||
| 0100-16009 | (010016009) | ASSY, PCB SMIF-ASYST WIDE BODY INTERLOCK | ||
| 0100-18043 | (010018043) | ASSY, PCB REMOTE SERIPLEX I/O HDP-CV (Seriplex IO Distribution) | ||
| 0100-20012 | (010020012) | Iso. Amp PCB | ||
| 0100-20030 | (010020030) | Relay Control PCB | ||
| 0100-20037 | (010020037) | Interlock Select PCB | ||
| 0100-20040 | (010020040) | Remote Supply Distribution Board | ||
| 0100-20042 | (010020042) | PCB assy | ||
| 0100-20173 | (010020173) | PCB Stepper Controller | ||
| 0100-35082 | (010035082) | PCB ASSY CHAMBER INTERCONNECT A&C CENTURA | ||
| 0100-35083 | (010035083) | PCB ASSY CHAMBER INTERCONNECT B&D CENTURA | ||
| 0100-35107 | (010035107) | ASS'Y PCB GAS PANEL DISTRIBUTION METCH CENTURA | ||
| 0100-38027 | (010038027) | PCBA, SERIPLEX I/O DISTRIBUTION | ||
| 0100-38033 | (010038033) | ASSY, PCV, CHAMBER SET INTERFACE (Ch. B) | ||
| 0100-76004 | (010076004) | Centerfiner pcb | ||
| 0100-76005 | (010076005) | Video Board | ||
| 0100-76029 | (010076029) | Chamber Interconnection Board A/C | ||
| 0100-76030 | (010076030) | Chamber Interconnection Board B/D | ||
| 0100-90293-A | (010090293A) | PWBA slotted OPTO | ||
| 0101-0236 | (01010236) | Valve | ||
| 0101-1007 | (01011007) | Plate Position Detector | ||
| 0101-1084 | (01011084) | Hand Controller | ||
| 0101-1128 | (01011128) | Robot Position Detector | ||
| 0101-1138 | (01011138) | 1ND Defector Robot | ||
| 0101-1173 | (01011173) | Vacuum Tongue | ||
| 0109-0605 | (01090605) | Assembly, MOV CLIP 0 Degrees | ||
| 0109-1385 | (01091385) | Assembly | ||
| 0109-1387 | (01091387) | Valve | ||
| 0109-8306 | (01098306) | Panel | ||
| 0110-09293 | (011009293) | Matrix PCB | ||
| 0140-00053 | (014000053) | SWITCH GATE VALE MAG 8336 | ||
| 0140-00279 | (014000279) | Lifter Motor Cable Ass`y .Strip Chamber | ||
| 0140-01734 | (014001734) | PNEU HARNESS, GASBOXTO GAS MODULE HP TXZ | ||
| 0140-01886 | (014001886) | Manometer cable | ||
| 0140-01888 | (014001888) | Controller to gate valve cable(Interface Cable) | ||
| 0140-09197 | (014009197) | Cable? 3cm? 24v?? | ||
| 0140-09223 | (014009223) | Harness Assy CVD | ||
| 0140-10053 | (014010053) | Cable, Assy. | ||
| 0140-11059 | (014011059) | Robot Arm Interface | ||
| 0140-20139 | (014020139) | HARNESS ASSY,TURBO ON/OFF CONTROL | ||
| 0140-20233 | (014020233) | SHIELD TREAT/TURBO | ||
| 0140-20320 | (014020320) | HARNESS ASSY | ||
| 0140-20502 | (014020502) | HARN ASSY AC 2-PHASE DRIVER | ||
| 0140-20518 | (014020518) | HARNESS ASSY BUF EXTENSION | ||
| 0140-20537 | (014020537) | RF MATCH HARNESS | ||
| 0140-20693 | (014020693) | HARNESS ASSY NEW MAIN CONNECT SHUTTER | ||
| 0140-20709 | (014020709) | Chamber interconnectbd power line | ||
| 0140-20710 | (014020710) | RF MATCH INTERLOCK HARNESS | ||
| 0140-20741 | (014020741) | HARNESS ASSY SOURCE COVER PVD | ||
| 0140-21123 | (014021123) | Motor Diver Cable(CN3) | ||
| 0140-21124 | (014021124) | Motor Diver Cable(CN4) | ||
| 0140-21444 | (014021444) | RF Match Harness Assembly | ||
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